|
Application: Photomask |
|
Variable glass size from 100mm ~ 1000mm |
|
Glass Size: above 20” x 24” (by customer request) |
|
Auto Load / Unload System |
|
Chemical Supply Unite: developer, etching, stripper |
|
Processing Method: |
| |
|
Develop |
|
|
|
|
|
|
|
|
|
Etching |
|
|
|
|
|
|
|
|
|
Strip |
|
|
|
|
|
|
|
|
|
Rinse |
|
|
|
|
|
|
|
|
|
Spin Dry |
|
|
|
|
|
|
|
|
|
|
|
|
Software: |
|
|
PLC / Touch Panel
Etching |
|
|
|
|
|
Graphical User Interface |
|
|
|
|
|
Programmable |
|
|
|
|
|
